Semiconductor apparatus and semiconductor device

ABSTRACT

A semiconductor apparatus includes a mounting board, a system on chip (SOC) package and a memory package which are provided on the mounting board. The SOC package includes a semiconductor chip and a package substrate on which the semiconductor chip is mounted. The semiconductor apparatus further includes a signal wiring line through which a signal between the semiconductor chip and the memory package is transmitted, being provided on the package substrate and in the mounting board and a measurement terminal connected to the signal wiring line on main surface of the package substrate.

BACKGROUND The present disclosure relates to semiconductor apparatus andis particularly useful for semiconductor apparatus having semiconductordevice with high-speed interfaces.

A semiconductor system constituting a ADAS system (AdvancedDriver-Assistance Systems) or the like in recent years includes asemiconductor device such as an SOC (System on Chip) having a high-speeddata processing device, and a memory device having a high-speedinterface (IF), for example, a DRAM (Dynamic Random-Access Memory. ForDRAM, Low Power DDR-SDRAM 4 (Double Data Rate Synchronous DRAM: LPDDR4)with Max Transfer Rate 4266 Mbps or Low Power DDR-SDRAM 5 (LPDDR5) withMax Transfer Rate 6400 Mbps, etc. can be used. The signals interfacedbetween SOC and DRAM are required to be faster. The semiconductor systemis required to be smaller in size and cost reduction. Furthermore, thereis an increasing demand for shorter Time to Market (i.e. Time to bringsemiconductor systems to market as products).

In such market trends, Japanese Unexamined Patent ApplicationPublication No. 2006-245393 discloses a method of placing a measurementterminal on a mounting board to guarantee for long-term reliability of asemiconductor apparatus in which a plurality of semiconductor deviceshaving a high-speed interface are mounted on a mounting board.

SUMMARY

The objective of Japanese Unexamined Patent Application Publication No.2006-245393 is device control using a test terminal and is not a measureof signal-quality during high-speed operation. Therefore, semiconductorapparatus of Japanese Unexamined Patent Application Publication No.2006-245393 discloses a structure that cancels the reflection from thedevice terminal and the test terminal (stub structure) during high-speedoperation. In order to realize this structure, it is necessary toconsider design constraints, terminal arrangement, impedance control,wiring length adjustment, etc. In order to further increase the speed ofthe signal and small amplitude of the signal, the design constraints aregreater. In addition, because the reflection effect on the originalsignal is considered and it is difficult to improve the signal quality,there is a problem that the versatility is low for signal measurement.

On the other hand, utilizing an interposer with a measurement terminalfor the purpose of measuring the signal quality is also widely known.FIG. 1 is a diagram illustrating a conceptual configuration example of asemiconductor apparatus when an interposer with a measurement terminalaccording to a comparative example is used. As shown in FIG. 1, asemiconductor apparatus 100 r includes a mounting board 110, an SOCpackage 120, a DRAM package 130, and an interposer 140. The SOC package120 and the interposer 140 are mounted on the mounting board 110, andDRAM package 130 is mounted on the interposer 140. The SOC package 120includes a semiconductor chip (SOC Die) 121 of semiconductor deviceincluding a high-speed data processing device, and a package substrate122 on which the semiconductor chip 121 is mounted. The DRAM package 130includes a semiconductor chip (DDR Die) 131 as DDR-SDRAM and a packagesubstrate 132 on which the semiconductor chip 131 is mounted. In FIG. 1,the wiring VC shows the power supply potential wiring and the powersupply potential layer or the like the power supply potential VCC issupplied, the wiring GD shows the ground potential wiring and the groundpotential layer ground potential GND is supplied. Further, between thewiring VC and the wiring GD, the capacitor C for power supplystabilization is connected. The wiring VC and the wiring GD areelectrically separated.

Here, the high-speed signal Sig between the semiconductor chip 121 andthe semiconductor chip 131 is transmitted through the signal line SL.The high-speed signal Sig is measured via the measurement terminal TE20provided on the mounting board 110, and via the measurement terminalTE21 provided on the interposer 140. As described in FIG. 1, whenplacing the measurement terminal TE20 on the mounting board 110, orsandwiching the interposer 140 with the measurement terminal TE21between the mounting board 110 and DRAM packaging 130, it has thefollowing three problems.

1) Signal-Quality (Quality)

By providing the measurement terminals TE20 and TE21, an extra stubstructure (STUB) is formed on the signal transmission path (SL).Therefore, the signal waveform of the high-speed signal Sig isdeteriorated. As a result, the signal waveform may not be correctlyevaluated, and the semiconductor system 100 r itself may not operate.

2) Packaging Area and Costs (Cost)

The area (ES) for providing the measurement terminals TE20, TE21 needsto be allocated on the mounting board 110 and the interposer 140. As aresult, the resources and the area of the mounting board 110, which is asystem board, increase. This is a disadvantage in terms of packagingarea and cost, as the market tends to be smaller and lower in cost.

3) Developmental Period (Delivery)

The interposer 140 needs to be mounted on the mounting board 110 by eachsystem manufacturer of the semiconductor system 100 r. Thus, thedevelopment period of the semiconductor system may be prolonged.

An object of the present disclosure is to provide a technique thatallows measurement terminals to be provided on semiconductor apparatuswithout compromising the signal quality of the high-speed signal.

Other objects and novel features will become apparent from thedescription of this specification and the accompanying drawings.

An outline of representative ones of the present disclosure will bebriefly described below.

According to one embodiment, a semiconductor apparatus includes amounting board, a system on chip (SOC) package formed on the mountingboard and including a semiconductor chip and a package substrate onwhich the semiconductor chip is mounted, a memory package formed on themounting board, a signal wiring line through which a signal between thesemiconductor chip and the memory package is transmitted, being providedon the package substrate and in the mounting board and a measurementterminal connected to the signal wiring line on main surface of thepackage substrate.

According to another embodiment, a semiconductor device includes asemiconductor chip, a package substrate on which the semiconductor chipis mounted, including a signal wiring line supplied with a signal forthe semiconductor chip, and a measurement terminal provided on a mainsurface of the package substrate and connected to the signal wiringline.

According to semiconductor apparatus of embodiments, the high-speedsignal can be measured without deteriorating the signal quality of thehigh-speed signal by using the measurement terminal.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating a conceptual configuration example of asemiconductor apparatus when an interposer with a measurement terminalaccording to a comparative example is used.

FIG. 2 is a diagram illustrating a conceptual configuration ofsemiconductor apparatus according to embodiments.

FIG. 3 is a diagram showing a configuration example of an area of thepackage substrate for measurement terminals are provided.

FIG. 4 is a plan view illustrating an exemplary configuration of the SOCpackage.

FIG. 5 is a diagram for explaining the connection to the probes of themeasuring apparatus.

FIG. 6 is a plan view illustrating an exemplary configuration of apackage substrate according to Embodiment 2.

FIG. 7 is a plan view illustrating a package substrate according tocomparative examples.

FIG. 8 is a plan view illustrating a package substrate according toEmbodiment 3.

DETAILED DESCRIPTION

Hereinafter, Embodiment will be described with reference to thedrawings. However, in the following description, the same components aredenoted by the same reference numerals, and a repetitive descriptionthereof may be omitted. It should be noted that the drawings may berepresented schematically in comparison with actual embodiments for thesake of clarity of explanation but are merely an example and do notlimit the interpretation of the present invention.

Embodiment 1

FIG. 2 is a diagram illustrating a conceptual configuration of asemiconductor apparatus according to Embodiment 1. As shown in FIG. 2,semiconductor apparatus 100 includes a mounting board 10, an SOC package20, and a DRAM package 30. The SOC package 20 and DRAM package 30 aremounted on the main surface of the mounting board 10. The SOC package 20includes a semiconductor chip (SOC Die) 21 of a semiconductor devicecontaining a high-speed data-processing device, and a package substrate22 on which the semiconductor chip 21 is mounted on its main surface.The DRAM package 30 includes a DDR-SDRAM memory semiconductor chip (DDRDie) 31 and a package substrate 32 on which the memory semiconductorchip 31 is mounted. The DRAM package 30 can also be referred to asmemory package.

In FIG. 2, the wiring VC shows the power supply potential wiring and thepower supply potential layer or the like power supply potential VCC issupplied, the wiring GD shows the ground potential wiring and the groundpotential layer ground potential GND is supplied. Further, between thewiring VC and the wiring GD, the capacitor C for power supplystabilization is connected. The wiring VC and the wiring GD areelectrically separated.

A measurement terminal TE1 is provided on the main surface of thepackage substrate 22. The measurement terminal TE1 is connected to oneterminal of the resistor R. The other terminal of the resistor R is usedas a probe terminal TP1 connected to the probe of the measuringapparatus. Here, the high-speed signal Sig transmitted via the signalline (signal wiring) SL, which is drawn in black between thesemiconductor chip 21 and the memory semiconductor chip 31, is measuredby utilizing a probe terminal TP1 connected to the measurement terminalTE1 via a resistor R provided on the package substrate 22 of the SOCpackage 20.

FIG. 3 is a diagram illustrating an exemplary configuration of an areaof a package substrate 22 in which measurement terminal TE1 is provided.FIG. 4 is a plan view illustrating an exemplary configuration of the SOCpackage 20. FIG. 5 is a diagram for explaining the connection to theprobes of the measuring apparatus.

As shown in FIG. 3, the package substrate 22 of the SOC package 20includes resin substrates of a multilayer wiring having a plurality ofwiring layers L1-L4. The wiring layers includes, from the upper layer, afirst wiring layer L1 as a top (TOP) layer, a second wiring layer L2, athird wiring layer L3, and a fourth wiring layer L4. The Insulatingresin layers are formed, on the first wiring layer L1, between the firstwiring layer L1 and the second wiring layer L2, between the secondwiring layer L2 and the third wiring layer L3, between the third wiringlayer L3 and the fourth wiring layer L4, and under the fourth wiringlayer L4. The through-holes Th1 and Th2 are formed so as to electricallyconnect between the wiring of the second wiring layer L2 and the wiringof the third wiring layer L3. On the inner surface of the through-holesTh1 and Th2, the conductive portion Vi1 and Vi2 subjected to conductiveplating is provided. The via electrodes Vi3 and Vi4 are formed so as toelectrically connect between the wiring of the first wiring layer L1 andthe wiring of the second wiring layer L2. Further, so as to electricallyconnect between the wiring of the third wiring layer L3 and the wiringof the fourth wiring layer L4, the via electrodes Vi5 and Vi6 areprovided.

As shown by cross-sectional view (Section View) in FIG. 3, in the topside of the package substrate 22, the measurement terminal TE1 formed inthe first wiring layer L1 is provided The measurement terminal TE1 iselectrically connected to the BGA terminal BS1 for a signal Sig providedon the bottom side of the package substrate 22 through the via electrodeVi3, the wiring L21 of the second wiring layer L2, the through-hole Th1,the wiring L31 of the third wiring layer L3, the via electrode Vi5, andvia the wiring L41 of the fourth wiring layer L4. The BGA terminal is aball-shaped terminal composed of a conductive material such as solder.

Further, in the top side of the package substrate 22, in the vicinity ofthe measurement terminal TE1, the GND terminal (ground terminal) TG1 formeasurement to which ground potential is supplied is provided. The GNDterminal TG1 is formed in the first wiring layer L1, and is electricallyconnected to the BGA terminal BG1 for the grounding potential, which isprovided on the bottom side of the package substrate 22 through the viaelectrode Vi4, the wiring L22 of the second wiring layer L2, thethrough-hole Th2, the wiring L32 of the third wiring layer L3, the viaelectrode Vi6, and via the wiring L42 of the fourth wiring layer L4.

As shown in plan view (Top View), the measurement terminal TE1 isdisposed above the through-hole Th1. Similarly, the GND terminal TG1 isdisposed above the through-hole Th2. The measurement terminal TE1, asdescribed in FIG. 2, is connected to one terminal of the resistor R.

As shown in FIG. 4, the SOC package 20 includes a rectangularsemiconductor chip 21 mounted on the main surface of the rectangularpackage substrate 22. The external terminals for a plurality of signalsformed on the main surface of the semiconductor chip 21 are electricallyconnected to a plurality of external terminals formed on the mainsurface of the package substrate 22. The plurality of external terminalsof the package substrate 22 are electrically connected to a plurality ofBGA terminals formed on the back surface of the package substrate 22through a plurality of internal wiring using, for example, the firstwiring layer L1 to the fourth wiring layer L4. The package substrate 22has a first side SD1, a second side SD2 facing the first side SD1, athird side SD3 between the first side SD1 and the second side SD2, and afourth side SD4 facing the third side SD3. The first side SD1 faces theside of DRAM package 30.

The main surface of the corner area 40 of the package substrate 22, asshown in an enlarged view, the measurement terminal TE1, the resistor Rand the GND terminal TG1 for measurement are provided. That is, themeasurement terminal TE1, the resistor R and the GND terminal TG1 formeasurement are provided in an area near the outer periphery of thepackage substrate 22. The area where the measurement terminal TE1, theresistor R and the GND terminal TG1 for measurement are provided shallbe referred to as a measurement terminal area TRR. That is, themeasurement terminal TE1, the resistor R and the GND terminal TG1 formeasurement are provided on the peripheral area of the package substrate22 at the side of the first side SD1 facing DRAM package 30. In thisexample, only one set, including the measurement terminal TE1, theresistor R and the GND terminal TG1 for measurement, is drawn. However,when a plurality of sets, each including the measurement terminal TE1,the resistor R and the GND terminal TG1 for measurement, are provided,the plurality of sets of them can be provided on the peripheral area ofthe package substrate 22 at the side of the first side SD1 facing DRAMpackage 30.

FIG. 5 shows an enlarged view of the measurement terminal area TRR,where the measurement terminal TE1, the resistor R and the GND terminalTG1 for measurement are provided, and the connection to the probe PRB ofthe measuring apparatus FIG. 5 shows the connection to the probe PRBwhen the probe PRB is a differential probe. One of the pair of probe PRBis connected to the probe terminal TP1, and the other of the pair ofprobe PRB is connected to the GND terminal TG1 for measurement. Eachterminal of the pair of probe PRB will be respectively connected to thenon-inverting input terminal (+) and the inverting input terminal (−) ofthe amplifier circuit AMP provided in the measuring apparatus TES. Theinverting input terminal (−) is connected to the ground potentialterminal gnd of the amplifier circuit AMP. Thus, the potentialdifference between the probe terminal TP1 and the GND terminal TG1 formeasurement, or the potential of the signal Sig, is monitored by theamplifier circuit AMP, so that the signal Sig can be measured. Thedistance LL1 between the center of the measurement terminal TE1 and thecenter of the GND terminal TG1 for measurement is about pitch intervalof the BGA terminals, preferably about 700 μm-1 mm.

By providing a measurement terminal TE1 and the GND terminal TG1 formeasurement on the SOC-package 20, the expected effectiveness is shownbelow.

1) Signal-Quality (Quality)

The measurement terminal TE1 on the SOC package 20 is arranged asfollows to prevent disturbance of the signal Sig as much as possible.This makes it particularly superior to the observation of high-speedsignal Sig.

1-1) Signal integrity at the time of measurement is ensured by providingthe GND terminal TG1 that is required for measuring within 1 mm from themeasurement terminal TE1 (about 1 mm in pitch of the BGA terminal). Forbetter signal-quality, the GND terminal TG1 should be a return path.Therefore, the GND terminal TG1 is preferably connected to the BGAterminal BG1 which is adjacent to the BGA terminal BS1 for signal Sig.The BGA terminal BS1 is disposed on the back surface of the packagesubstrate 22 (bottom side). The BGA terminals BS1 and the measurementterminal TE1, and the BGA terminal BG1 and the GND terminal TG1 areconnected each other via through-holes Th1 and Th2 (longest and largehole for electrically connecting in the longitudinal direction),respectively. That is, in order to minimize the path on the packagesubstrate of the signal and return path, the through holes Th1 and Th2are provided so as to be disposed in the vicinity of the BGA terminalsBS1 and BG1, respectively.

1-2) Signal degradation due to stub structure including the measuringsystem is prevented by connecting the resistor R to the measurementterminal TE1. The resistor R is arranged so as not to disturb the signalto be measured Sig in the branch structure. When the resistance value ofthe resistor R is too high resistance, the signal Sig does notpropagate. On the other hand, when the resistance value of the resistorR is too low resistance, the branch structure is seen. Therefore, theresistance value of the resistor R is preferably selected to several 10to several 100 ohm. The oscilloscope may include a model of themeasurement system to use a waveform correction function that correctsthe acquired signal waveform.

Further, the signal Sig from the semiconductor chip 21 is transmittedthrough the wiring of the wiring layer Top (L1) or the wiring layer L2of the package substrate 22, and appears at the BGA terminal BS1 onbottom side through the through-hole Th1. One terminal of the resistor Rwhich is disposed on the top side of the package substrate 22 and isconnected to the signal line SL of the signal Sig to be measured isprovided in the vicinity of the through-hole Th1 (near the BGA terminalon the bottom side). Since the size of the resistor R is standardized to1005 (1.0 mm*0.5mm) or 0603 (0.6 mm*0.3 mm), the other terminal (TP1:probe terminal) of the resistor R is also determined to some extent.

Since a measurement terminal TE1 is provided on the package substrate 22of the SOC package 20, the signal Sig can be measured without affectingthe connection with an external device. Therefore, signals fromconnected devices, in this instance, DRAM packages 30, can also bemeasured.

1-3) By providing the measurement terminal TE1 in the vicinity of theouter periphery side of the package substrate 22, it is possible toallocate an area to be provided with the resistor elements R and the GNDterminal TG1 for measurement. That is, in the outer periphery side ofthe package substrate 22, the area for the measurement terminal TE1, theresistor R and the GND terminal TG1 for measurement is easily allocated.Therefore, it is also possible to provide a plurality of sets eachincluding the measurement terminal TE1, the resistor R and the GNDterminal TG1 for measurement on the outer periphery side of the packagesubstrate 22, so that it is possible to increase the number of signalsto be measured.

2) Packaging Area/Cost (Cost)

By providing the measurement terminal TE1 on the package substrate 22 ofthe SOC package 20, the area ES1 shown in FIG. 2 can be reduced incomparison to the area ES of FIG. 1. That is, an extra area on themounting board 10 is not required. This is advantageous in terms ofmounting area and cost of the semiconductor system 100.

3) Developmental Period (Delivery)

By providing the measurement terminal TE1 on the package substrate 22 ofthe SOC package 20, the customer can shorten the development period toprovide the measurement terminals on the respective mounting board 10 inthe area ES1 of FIG. 2.

Embodiment 2

FIG. 6 is a plan view illustrating an exemplary configuration of thepackage substrate 22 according to Embodiment 2. This embodiment shows anexample in which the measurement terminal TE1 and the GND terminal TG1for measurement are arranged side by side, but is not limited thereto.As shown in FIG. 6, when a plurality of the sets of the measurementterminal TE1 and the resistor R are allocated at the outer peripheryside of the package substrate 22, the other of the probe PRB to beconnected to the ground potential terminal gnd of the amplifier circuitAMP of the measuring apparatus may be connected to the ground regionportion (GND region portion) 60 provided at the entire periphery of theouter periphery of the package substrate 22 in a ring shape. If thefirst wiring layer L1 of the package substrate 22 is a ground planelayer supplied with a ground potential, the GND region portion 60 can berelatively easily formed only by removing the resin layer provided onthe first wiring layer L1 by etching.

According to Embodiment 2, by providing a plurality of measurementterminals TE1 on the outer periphery side of the package substrate 22,it is possible to increase the number of signals to be measured.Further, since the GND region portion 60 is provided on the entireperiphery of the outer periphery of the package substrate 22, even ifthe number of signals to be measured (i.e., the number of measurementterminals TE1) increases, only by connecting the probe PRB connected tothe ground potential terminal gnd of the amplifier circuit AMP of themeasuring apparatus to the GND region portion 60, the ground potentialterminal gnd can be relatively easily supplied to the ground potential.

Modified Example

The GND region portion 60, as shown in FIG. 6, is not limited to theconfiguration provided in a ring shape in the outer periphery side ofthe package substrate 22. The GND region portion 60 may be provided witha plurality of GND region portions 60 so as to be dotted in a ring shapeon the entire periphery of the outer periphery of the package substrate22, of course. The GND region portion 60 may also be provided finelyarranged in a terminal shape.

The GND region portion 60, further, may be provided as several rows ofGND terminal group concentrically for the signals disposed on the innerperipheral side of the BGA terminal arrangement. In this case, since thedistance between the concentric annulus depends on the BGA terminalarrangement of the signal Sig, it may be an integer multiple of thepitch of the BGA terminal.

Embodiment 3

FIG. 7 is a plan view illustrating package substrate according tocomparative examples. FIG. 8 is a plan view illustrating a packagesubstrate according to Embodiment 3.

In the wiring layer configuration of the package substrate 22 ofEmbodiment 1 or Embodiment 2, the first wiring layer L1 as Top layer andthe third wiring layer L3 are assumed to be assigned as ground planelayers of the ground potential GND (or VSS). Further, the second wiringlayer L2 is assumed to be assigned as a wiring layer in which aplurality of wirings for transmitting the high-speed signals Sig areformed. At this time, as shown in FIG. 6, the wirings for the high-speedsignals Sig becomes a strip line construction, both of the GND of thefirst wiring layer L1 and the third wiring layer L3 are the reference(i.e. return path). Since the measurement terminal TE1 is provided inthe Top layer (first wiring layer L1), the top layer as the reference onthe area L1N overlapping with the wirings L2S1 and L2S2 for high-speedsignal Sig of the second wiring layer L2 is eliminated. Therefore, theimpedance on the area L1N is higher than the other area with Strip Linestructure. Thus, the signal quality of the high-speed signal Sigtransmitted through a plurality of wirings L2S1 and L2S2 is reduced.That is, as shown in FIG. 7, the ground plane layers L1G of thegrounding potential GND or VSS are deleted from the inner portions ofthe regions L1N, so that Strip Line structures cannot be formed.

In Embodiment 3, as shown in FIG. 8, the measurement terminals TE1 isformed in the Top layer (first wiring layer L1), and the second wiringlayer L2 and the fourth wiring layer L4 is assigned to the ground planelayer of the ground potential GND. Furthermore, the third wiring layerL3 is assigned to the wiring layer for a plurality of wirings ofhigh-speed signal Sig. In this way, the layer configuration of thepackage substrate 22 is changed. That is, on the lower layer of themeasurement terminal TE1, the ground plane layer L2G constituted by thesecond wiring layer L2 is provided. Therefore, since the upper and lowerlayers of the plurality of wiring L2S1 and L2S2 for transmitting thehigh-speed signal Sig are ground plane layers, the Strip Lineconstruction is formed and the signal quality of the high-speed signalSig is improved. In FIG. 8, a portion of the ground plane layer L2G ofthe ground potential GND (or VSS) on the area L2N is deleted, there isno particular problem.

In this case, in order to measure the high-speed signal Sig in thevicinity of the return path, the GND terminal TG1 of the Top layer isrequired to connect to the ground plane layer of the second wiring layerL2 through via electrode Via (or through-hole Th) in the vicinity of theterminal.

As described in FIG. 8, if the continuity of the GND return path cannotbe ensured because of the arrangement of the measurement terminal TE1,the GND layer (here, the ground plane layer of the second wiring layerL2) is added. By doing this, the return path is ensured, and the signalquality of the high-speed signal Sig is improved.

Application Examples

In FIGS. 2, 3 and 4 of Embodiment 1 and FIG. 6 of Embodiment 2, aninspection device capable of performing inspection can be configured foreach system board including the mounting board 10, the SOC package 20,and DRAM package 30 by contacting a needle (probe) of the measuringapparatus on the probe terminal TP1 that is the other end of theresistor R provided on the main surface or upper surface of the packagesubstrate 22 of the SOC package 20.

In the system fails, the DRAM package 30 is replaced in the systemboards 10, 20, and 30, thereby making it possible to configure aninspection device capable of determining whether the memory device inDRAM package 30 is defective or not.

In addition, a development inspection device can be provided that canclarify the differences when the target mounting board (10) or device(SOC package 20 or DRAM package 30) is changed, such as when themounting board is changed by deploying the customer system, when thememory vendor is changed, or when the memory process is changed. Thus,it is possible to reduce the development man-hours of the semiconductorsystem.

While the invention made by the present inventor has been specificallydescribed above based on the Embodiment, the present invention is notlimited to the above-described embodiment and Embodiment, and it isneedless to say that the present invention can be variously modified.

What is claimed is:
 1. A semiconductor apparatus comprising: a mountingboard; a system on chip (SOC) package provided on the mounting board andincluding a semiconductor chip and a package substrate on which thesemiconductor chip is mounted; a memory package provided on the mountingboard; a signal wiring line through which a signal between thesemiconductor chip and the memory package is transmitted, being providedon the package substrate and in the mounting board; and a measurementterminal connected to the signal wiring line on main surface of thepackage substrate.
 2. The semiconductor apparatus according to claim 1,wherein the measurement terminal is arranged in the outer periphery sideof the package substrate.
 3. The semiconductor apparatus according toclaim 2 further comprising: a ground terminal for measurement arrangedin the vicinity of the measurement terminal on the package substrate. 4.The semiconductor apparatus according to claim 3, wherein a distancebetween the measurement terminal and the ground terminal for measurementis about 700 μm to 1 mm.
 5. The semiconductor apparatus according toclaim 3, wherein the package substrate further includes a resistorconnected to the measurement terminal.
 6. The semiconductor apparatusaccording to claim 2, wherein the package substrate further includes aground area portion arranged in the vicinity of the measurementterminal, and wherein the ground area portion is arranged in a ringshape on the outer periphery of the package substrate.
 7. Thesemiconductor apparatus according to claim 6, wherein the packagesubstrate further includes a resistor connected to the measurementterminal.
 8. The semiconductor apparatus according to claim 2, whereinthe package substrate includes resin substrates of multilayer wiring,wherein the multilayer wiring includes a first, a second, a third and afourth wiring layer, wherein the measurement terminal is formed by awiring of the first wiring layer, wherein the second wiring layer andthe fourth wiring layer are ground plane layer supplied with a groundpotential, and wherein the third wiring layer includes a plurality ofwirings for transmitting the signal output from the semiconductor chip.9. A semiconductor device, comprising: a semiconductor chip; a packagesubstrate on which the semiconductor chip is mounted, including a signalwiring line supplied with a signal for the semiconductor chip; and ameasurement terminal provided on a main surface of the package substrateand connected to the signal wiring line.
 10. The semiconductor deviceaccording to claim 9, wherein the measurement terminal is arranged inthe outer periphery side of the package substrate.
 11. The semiconductordevice according to claim 10, further comprising: a ground terminal formeasurement arranged in the vicinity of the measurement terminal on thepackage substrate.
 12. The semiconductor device according to claim 11,wherein a distance between the measurement terminal and the groundterminal for measurement is about 700 μm to 1 mm.
 13. The semiconductordevice according to claim 11, wherein the package substrate furtherincludes a resistor connected to the measurement terminal.
 14. Thesemiconductor device according to claim 9, wherein the package substrateincludes resin substrates of multilayer wiring, wherein the multilayerwiring includes a first, a second, a third and a fourth wiring layer;wherein the measurement terminal is formed by a wiring of the firstwiring layer, wherein the second wiring layer and the fourth wiringlayer are ground plane layers supplied with a ground potential, andwherein the third wiring layer includes a plurality of wirings fortransmitting the signal output from the semiconductor chip.